WP1 – Devices for 3D Integration
In work package 1 we will develop materials, processes and devices to be used in WP2 and WP3. The topics include:Material synthesis with emphasis on III-V nanowire epitaxial growth both using metal organic vapor phase epitaxy and aerotaxy.Scaling of nanowire growth substrates from individual dies to 100 mm Si wafersNanowire surface passivation for photonic devices and gate-stack optimization for t
https://www.advancedchiptechnologies.lu.se/wp1-devices-3d-integration - 2025-06-29